Synthesis and characterization of ZrO2: MgO thin films by plasma of R.F. magnetron sputtering

Abstract

The aim of this work is to prepare thin composite films from zirconia (ZrO2) and magnesia (MgO) on to glass basis by plasma of R.F. magnetron sputtering as well as recognize their structural and optical properties. It also aims to study the effect of thermal processing at 450 °C in two hours duration. The structural properties are measured by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The chemical analysis for the ready films had been studied using energy dispersive x-ray (EDX). The optical properties had been studied by using UV-Visible spectroscopy. Results show that the grain size of the ready films, which were thermally treated, was between 18.44 and 33.22 nm and the crystalline structure was a monoclinic phase with almost a spherical form for the grains. There was a homogenous distribution for all the ready films. The energy gaps decreased from 3.9 to 3.09 eV with an increase in the doping ratios.

Keywords

• ZrO2: MgO thin films
• plasma sputtering technique
• structural properties
• optical properties and thermal effect