Micromachines (Jun 2024)

Design of Broadband High-Frequency Multi-Throw RF-MEMS Switches

  • Jian Yu,
  • Maoyun Zhang,
  • Jing Li,
  • Yuheng Si,
  • Zijun Zhu,
  • Qiannan Wu,
  • Mengwei Li

DOI
https://doi.org/10.3390/mi15070813
Journal volume & issue
Vol. 15, no. 7
p. 813

Abstract

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This paper introduces a broadband triple-pole triple-throw (3P3T) RF MEMS switch with a frequency range from DC to 380 GHz. The switch achieves precise signal control and efficient modulation through its six-port design. It achieves an insertion loss of −0.66 dB across its frequency range, with isolation and return loss metrics of −32 dB and −15 dB, respectively. With its low actuation voltage of 6.8 V and rapid response time of 2.28 μs, the switch exemplifies power-efficient and prompt switching performance. The compact design is ideal for integration into space-conscious systems. This switch is pivotal for 6G research and has potential applications in satellite communications, military radar systems, and next-generation radio applications that require multi-antenna access.

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