Ultra-high on-chip optical gain in erbium-based hybrid slot waveguides

Abstract

Realizing efficient on-chip amplification in silicon is challenging due to either non-compatible integration or small gain per unit length of the amplifier material. Here, the authors report ultra-high on-chip optical gain in erbium-based hybrid silicon nitride slot waveguides with a monolithic, CMOS-compatible and scalable atomic-layer deposition process.