In this paper, a piezoelectrically driven quasi-static MEMS mirror is developed for a scanning LiDAR system. Finite element method (FEM) simulations are used to optimize the design of the MEMS scanner. With special emphasis on the shape and thickness of the actuators, they are optimized to reach a maximum static total optical scan angle (TOSA) of 30°. Their influence on the resonance frequency at dynamic modes and the material stress are investigated. In this study, two designs are compared with respect to their FEM simulation results. Currently, the devices are manufactured in the cleanroom. The manufactured samples will be characterized and the measurement results will be published in future works.
