Silicon single-photon avalanche diodes with nano-structured light trapping

Kai Zang; Xiao Jiang; Yijie Huo; Xun Ding; Matthew Morea; Xiaochi Chen; Ching-Ying Lu; Jian Ma; Ming Zhou; Zhenyang Xia; Zongfu Yu; Theodore I. Kamins; Qiang Zhang; James S. Harris

doi:10.1038/s41467-017-00733-y

Nature Communications (Sep 2017)

Silicon single-photon avalanche diodes with nano-structured light trapping

Kai Zang,
Xiao Jiang,
Yijie Huo,
Xun Ding,
Matthew Morea,
Xiaochi Chen,
Ching-Ying Lu,
Jian Ma,
Ming Zhou,
Zhenyang Xia,
Zongfu Yu,
Theodore I. Kamins,
Qiang Zhang,
James S. Harris

Affiliations

Kai Zang: Department of Electrical Engineering, Stanford University
Xiao Jiang: Hefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of China
Yijie Huo: Department of Electrical Engineering, Stanford University
Xun Ding: Hefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of China
Matthew Morea: Department of Electrical Engineering, Stanford University
Xiaochi Chen: Department of Electrical Engineering, Stanford University
Ching-Ying Lu: Department of Electrical Engineering, Stanford University
Jian Ma: Hefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of China
Ming Zhou: Department of Electrical and Computer Engineering, University of Wisconsin-Madison
Zhenyang Xia: Department of Electrical and Computer Engineering, University of Wisconsin-Madison
Zongfu Yu: Department of Electrical and Computer Engineering, University of Wisconsin-Madison
Theodore I. Kamins: Department of Electrical Engineering, Stanford University
Qiang Zhang: Hefei National Laboratory for Physical Sciences at the Microscale and Department of Modern Physics, University of Science and Technology of China
James S. Harris: Department of Electrical Engineering, Stanford University

DOI: https://doi.org/10.1038/s41467-017-00733-y
Journal volume & issue: Vol. 8, no. 1
pp. 1 – 6

Abstract

Read online

The performance of silicon single-photon avalanche detectors is currently limited by the trade-off between photon detection efficiency and timing jitter. Here, the authors demonstrate how a CMOS-compatible, nanostructured, thin junction structure can make use of tailored light trapping to break this trade-off.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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