Tribology Online (Nov 2012)

Friction Characteristics of Amorphous Carbon Films on Rubber Deposited by Cold Atmospheric Pressure Plasma

  • Norihito Mizote,
  • Shin-ichi Kuroda

DOI
https://doi.org/10.2474/trol.7.234
Journal volume & issue
Vol. 7, no. 4
pp. 234 – 241

Abstract

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Hydrogenated amorphous carbon (a-C:H) films were deposited on rubber surface by plasma-enhanced chemical vapor deposition (CVD), using a non-equilibrium atmospheric pressure plasma torch. The effects of oxygen, in the deposition atmosphere, on the chemical and mechanical characteristics of a-C:H films were investigated. It was clarified that the amount of carbon atoms combined with oxygen atoms in the a-C:H films increased with the increase of the oxygen content in the deposition atmosphere. On the other hand, surface hardness decreased as the oxygen content increased. As a result, a very low frictional property of a-C:H films was achieved by CVD, using the non-equilibrium atmospheric pressure plasma torch with eliminating oxygen from the deposition atmosphere.

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