Protocol for fabricating a photonic structure consisting of ZnO/Ag/ZnO film perforated with 2D periodic apertures based on photolithography technology

Saichao Dang; Jiayu Zhou; Hong Ye; Fangfang Peng; Yu Wei; Wenjuan Li; Xiuxia Wang; Yizhao He

STAR Protocols (Jun 2022)

Protocol for fabricating a photonic structure consisting of ZnO/Ag/ZnO film perforated with 2D periodic apertures based on photolithography technology

Saichao Dang,
Jiayu Zhou,
Hong Ye,
Fangfang Peng,
Yu Wei,
Wenjuan Li,
Xiuxia Wang,
Yizhao He

Affiliations

Saichao Dang: Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People’s Republic of China; Corresponding author
Jiayu Zhou: Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People’s Republic of China
Hong Ye: Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People’s Republic of China; Corresponding author
Fangfang Peng: USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People’s Republic of China
Yu Wei: USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People’s Republic of China
Wenjuan Li: USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People’s Republic of China
Xiuxia Wang: USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People’s Republic of China
Yizhao He: USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People’s Republic of China

Journal volume & issue: Vol. 3, no. 2
p. 101242

Abstract

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Summary: A ZnO/Ag/ZnO film with 2D periodic apertures can have a high visible transmittance and low emittances in atmospheric windows for visible-infrared compatible camouflage and a high transmittance in 5–8 μm for heat dissipation by radiation. This following protocol details the fabrication process of such a photonic structure based on photolithography technology. Also described are the related challenges and troubleshooting steps.For complete details on the use and execution of this protocol, please refer to Dang and Ye (2021).

Published in STAR Protocols

ISSN: 2666-1667 (Online)
Publisher: Elsevier
Country of publisher: United States
LCC subjects: Science: Science (General)
Website: https://star-protocols.cell.com/

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