Simulation Study of Low-Dose 4D-STEM Phase Contrast Techniques at the Nanoscale in SEM

Abstract

Phase contrast imaging is well-suited for studying weakly scattering samples. Its strength lies in its ability to measure how the phase of the electron beam is affected by the sample, even when other imaging techniques yield low contrast. In this study, we explore via simulations two phase contrast techniques: integrated center of mass (iCOM) and ptychography, specifically using the extended ptychographical iterative engine (ePIE). We simulate the four-dimensional scanning transmission electron microscopy (4D-STEM) datasets for specific parameters corresponding to a scanning electron microscope (SEM) with an immersive objective and a given pixelated detector. The performance of these phase contrast techniques is analyzed using a contrast transfer function. Simulated datasets from a sample consisting of graphene sheets and carbon nanotubes are used for iCOM and ePIE reconstructions for two aperture sizes and two electron doses. We highlight the influence of aperture size, showing that for a smaller aperture, the radiation dose is spent mostly on larger sample features, which may aid in imaging sensitive samples while minimizing radiation damage.

Keywords

• electron microscopy
• phase contrast
• STEM
• SEM
• 4D-STEM
• ptychography