MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration

Zilian Qi; Tianwei Zhang; Xiao-Dong Zhang; Qing Xu; Kun Cao; Rong Chen

Nano Materials Science (Dec 2023)

MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration

Zilian Qi,
Tianwei Zhang,
Xiao-Dong Zhang,
Qing Xu,
Kun Cao,
Rong Chen

Affiliations

Zilian Qi: State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China
Tianwei Zhang: State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China
Xiao-Dong Zhang: State Key Laboratory of Materials Processing and Die & Mold Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China; Corresponding author.
Qing Xu: State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China
Kun Cao: State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China; Corresponding author.
Rong Chen: State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Hubei, 430074, China; Corresponding author.

Journal volume & issue: Vol. 5, no. 4
pp. 439 – 446

Abstract

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The flexible pressure sensor has been credited for leading performance including higher sensitivity, faster response/recovery, wider detection range and higher mechanical durability, thus driving the development of novel sensing materials enabled by new processing technologies. Using atomic layer infiltration, Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene, allowing a modulation of its interlayer spacing, electrical conductivity and piezoresistive property. The flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper substrate. It is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor, including increase of sensitivity from 0.08 kPa−1 to 0.5 kPa−1, extension of detection limit from 5 kPa to 9 kPa, decrease of response time from 200 ms to 20 ms, and reduction of recovery time from 230 ms to 50 ms. The mechanical durability of the flexible sensor is also improved, with the piezoresistive performance stable over 1000 cycles of flexure fatigue. The atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications.

Published in Nano Materials Science

ISSN: 2589-9651 (Online)
Publisher: KeAi Communications Co., Ltd.
Country of publisher: China
LCC subjects: Technology: Engineering (General). Civil engineering (General)
Website: https://www.keaipublishing.com/en/journals/nano-materials-science/

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