Optimizing the Electrode Geometry of an In-Plane Unimorph Piezoelectric Microactuator for Maximum Deflection

Abstract

Piezoelectric microactuators have been widely used for actuation, sensing, and energy harvesting. While out-of-plane piezoelectric configurations are well established, both in-plane deflection and asymmetric electrode placement have been underexplored in terms of actuation efficiency. This study explores the impact of asymmetric electrode geometry on the performance of slender unimorph actuators that deflect in-plane, where actuator length is much larger than width or thickness. After validating the finite element modeling method against experimental data, the geometric parameters of the proposed unimorph model are manipulated to explore the effect of different electrode geometries and layer thicknesses on actuation efficiency. Four key findings were that (1) the fringing field within the piezoelectric material plays a measurable role in performance, (2) symmetry in electrode placement is generally nonoptimal, (3) optimal electrode geometry is independent of scale, and (4) the smaller the ratio of width to thickness, the larger the deflection. The findings contribute to the development of efficient design strategies that optimize the performance of planar actuators for potential implications for microelectromechanical systems (MEMS). To aid designers of piezoelectric unimorph actuators in determining the optimal electrode geometry, three types of parameterized figures and two types of simulation apps are provided.

Keywords

• piezoelectric
• planar actuator
• microactuators
• microelectromechanical systems
• MEMS