Evaluation of morphology, mechanical properties and adhesion of boron nitride thin films produced using pulsed laser deposition

Abstract

The article presents preliminary results of investigation on morphology (AFM, FTIR) of boron nitride thin films deposited onto steel substrates using PLD method. Mechanical properties (hardness and elastic modulus) of the coatings and their adhesion to the substrates were measured.On the basis of obtained results, the possibility of using steel as a substrate for pulsed laser depositionof BN films was confirmed.[b]Keywords[/b]: thin films, boron nitride, nanohardness, critical load

Keywords

• cienkie powłoki
• azotek boru
• nanotwardość
• obciążenie krytyczne