Laser Energy Effects on Optical Properties of Titanium Di- Oxide Prepared by Reactive Pulsed Laser Deposition

Abstract

In this Work, Laser energy effects on optical and morphological properties of TiO2 thin film has been carried out using Reactive Pulsed Laser as a Deposition technique (RPLD). Q-switched Nd-YAG laser with (ë=1.06ìm, t =7nsec) and different energies have been used to ablate pure Titanium target and deposited thin films on glass substrates with constant substrate temperature of (343K). The optical properties of the films prepared include Optical transmit ion and absorption measurement, surface uniformity measurement and FTIR structure of these films. The results films show that high transparency reached to about (85-98) % can be achieved with TiO2 film which itself decreases sharply with the increasing of Laser energy while the optical band gap is (3.7-3.9) eV at optimum Laser energy in all results (800mJ), the FTIRstructure result at 800 mJ is the optimum and peaks absorption of TiO2 are (408.91, 439.77, 524.64) cm-1.

Keywords

• titanium di
• oxide
• thin films
• laser deposition