Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm

Abstract

In this study, based on the principle of grating interferometer-based acoustic sensors, design guidelines for the grating interferometric module were obtained and analyzed considering various factors in order to obtain high sensitivity, and a glass-based grating interference component and its acoustic sensor device were developed. The key parameters of the grating interference structure were extracted, and their effects on the acoustic response sensitivity were quantified for multiple mechanisms. For the development of the acoustic sensor, the grating-on-convex-platform structure and the micromachining processes of the glass-based components were designed and developed. The developed acoustic sensor samples achieved high sensitivity. In particular, the sample suitable for low-frequency application obtained a sensitivity of 0.776 V/Pa @ 1 kHz, and the spectrum of its sensitivity was flat from 50 Hz to 8 Hz with a deviation less than 1.5 dB and a sensitivity of 0.408 V/Pa @ 20 Hz.

Keywords

• acoustic sensor
• grating interferometer
• micromachining
• squeeze film damping