Phase Shifting Approaches and Multi-Channel Interferograms Position Registration for Simultaneous Phase-Shifting Interferometry: A Review

Abstract

Simultaneous phase-shifting interferometry (SPSI) can simultaneously obtain multiple phase-shifted interferograms and can realize the dynamic wavefront measurement with the use of a phase-shifting algorithm. From the respect of a beam-splitting technique and phase shift achievement of the phase-shifting units, research progress on spatial phase shifting approaches for SPSI systems are classified and summarized, and the key problem affecting SPSI technology is discussed. To ensure the measurement accuracy, it is necessary to perform accurate position registration for multi-channel phase-shifted interferograms before the implementation of a phase-shifting algorithm, and so, the methods of position registration for multi-channel interferograms are also reviewed. This review is expected to prompt research on related fields of phase-shifting interferometry.

Keywords

• interferometry
• simultaneous phase-shifting interferometry (SPSI)
• phase-shifting approach
• multi-channel interferograms
• position registration