Error Correction for FSI-Based System without Cooperative Target Using an Adaptive Filtering Method and a Phase-Matching Mosaic Algorithm

Abstract

In our frequency scanning interferometry-based (FSI-based) absolute distance measurement system, a frequency sampling method is used to eliminate the influence of laser tuning nonlinearity. However, because the external cavity laser (ECL) has been used for five years, factors such as the mode hopping of the ECL and the low signal-to-noise ratio (SNR) in a non-cooperative target measurement bring new problems, including erroneous sampling points, phase jumps, and interfering signals. This article analyzes the impacts of the erroneous sampling points and interfering signals on the accuracy of measurement, and then proposes an adaptive filtering method to eliminate the influence. In addition, a phase-matching mosaic algorithm is used to eliminate the phase jump, and a segmentation mosaic algorithm is used to improve the data processing speed. The result of the simulation proves the efficiency of our method. In experiments, the measured target was located at eight different positions on a precise guide rail, and the incident angle was 12 degrees. The maximum deviation of the measured results between the FSI-based system and the He-Ne interferometer was 9.6 μm, and the maximum mean square error of our method was 2.4 μm, which approached the Cramer-Rao lower bound (CRLB) of 0.8 μm.

Keywords

• frequency scanning interferometry
• adaptive filtering method
• mosaic algorithm