EPJ Web of Conferences (Jan 2022)

Enhanced thin film analysis via High Resolution RBS using the NEC CARBS system

  • Pollock Thomas,
  • Alderson Eric,
  • Berk Kevin,
  • McQuown Levon,
  • Kostanovskiy Ilya,
  • Wang Peng,
  • Knyazev Dmitry,
  • Parkin Stuart S. P.

DOI
https://doi.org/10.1051/epjconf/202226101006
Journal volume & issue
Vol. 261
p. 01006

Abstract

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Advancements in thin film deposition techniques can now produce films of only a few monolayers in thicknesses, with multiple applications emerging in the nano technology field. This maturing manufacturing technique is driving the need for diagnostics tools able to accurately measure depth profiles. To meet this need, the Compact Automated Rutherford Back-Scattering (CARBS) system is under development at National Electrostatics Corp. (NEC) for nanometer thin film analysis using High-resolution RBS (HRBS) within a 4 x 4meter footprint. We present the recent development of the system and demonstrate a study of HRBS applied to a 30nm CoAl alloy film. We compare the performance of the CARBS system with the conventional NEC HRBS end station and discuss the advantages of HRBS over SIMS method.