Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon

Učënye Zapiski Kazanskogo Universiteta: Seriâ Fiziko-Matematičeskie Nauki. 2016;158(3):404-423


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Journal Title: Učënye Zapiski Kazanskogo Universiteta: Seriâ Fiziko-Matematičeskie Nauki

ISSN: 2541-7746 (Print); 2500-2198 (Online)

Publisher: Kazan Federal University

Society/Institution: Kazan Federal University

LCC Subject Category: Science: Mathematics

Country of publisher: Russian Federation

Language of fulltext: Russian

Full-text formats available: PDF



V.Ju. Chebakova (Kazan Federal University, Kazan, 420008 Russia)


Blind peer review

Editorial Board

Instructions for authors

Time From Submission to Publication: 17 weeks


Abstract | Full Text

A one-dimensional self-consistent model of capacitive coupled radio-frequency discharge between symmetrical electrodes in argon in the local approximation at atmospheric pressure is considered in this paper. Electrons, atomic and molecular ions, metastable atoms and dimers of argon, as well as atoms in the ground state are taken into account in the model. A numerical algorithm is described for solving the mathematical model based on finite-dimensional approximation of the problem using difference schemes with subsequent application of the iterative process for its realization. A software package is developed in the MatLab environment to implement the algorithm of numerical calculation. The results of numerical calculations for the interelectrode distance of 0.2 and 2 cm at atmospheric pressure are given. The results of our calculations are in good agreement with the known results of field experiments and calculations.