Application of Box Behnken Design to Optimize the Parameters to Synthesis Graphene by CVD Process

Abstract

This paper discusses the use of Box Behnken design (BBD) approach to plan the experiments for turning the yield of CVD, thickness and layer number of graphene sheets with an overall objective of optimizing the process to provide higher graphene production volume, fewer layers and thinness structure of graphene. BBD is having the maximum efficiency for an experiment involving four factors such as total gas flow, gas ratio (H2/CH4), temperature, and reaction time in three levels. The proposed BBD requires 25 runs of experiment for data acquisition and modeling the response surface. Three regression models were developed and their adequacies were verified to predict the output values at nearly all conditions. Further, the models were validated by performing experiments, taking three sets of random input values. The output parameters measured through experiments (actual) are in good consistency with the predicted values using the models. This work resulted in identifying the optimized set of turning parameters for CVD process to achieve high yield value and good structure of graphene. In the best condition, yield of process is 6.1%.

Keywords

• Box - behnken
• CVD
• Graphene
• Optimization
• Yield