Sensors (Aug 2003)

The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

  • Jianzhong Gu,
  • Minghua Lu,
  • Zheng Qin,
  • Minghong Wu,
  • Zheng Jiao

DOI
https://doi.org/10.3390/s30800285
Journal volume & issue
Vol. 3, no. 8
pp. 285 – 289

Abstract

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In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

Keywords