Cylindrical Shell Vibration Gyroscope Excited and Detected by High-Temperature-Sintered Piezoelectric Ceramic Electrodes

Abstract

A cylindrical shell piezoelectric vibration gyroscope is a kind of Coriolis vibration gyroscope. Its core components are the cylindrical quartz resonator (CQR) and the piezoelectric ceramic electrodes (PCEs). In order to develop a high-precision Cylindrical shell piezoelectric vibration gyroscope, it is very important to reduce the influence of the PCEs and obtain a high-quality-factor CQR. To achieve this goal, a novel high-temperature sintering method is proposed to combine the CQR and the PCEs, and the corresponding sintered resonators are fabricated. After sintering, results of the acoustic excitation experiment and piezoelectric excitation experiment are tested, and the influence of the sintered PCEs on the CQR is determined. A complete gyroscope is obtained by vacuum packaging the sintered resonator. Through the open-loop and closed-loop tests, the performance parameters of gyroscope are obtained. The feasibility of the high-temperature sintering method is proved by experiments.

Keywords

• cylindrical shell piezoelectric vibration gyroscope
• quartz resonator
• piezoelectric ceramic electrode
• Q factor
• piezoelectric excitation and detection
• high-temperature sintering