Micromachines (Jan 2023)

Editorial for the Special Issue on Advanced Interconnect and Packaging

  • Wen-Sheng Zhao

DOI
https://doi.org/10.3390/mi14010171
Journal volume & issue
Vol. 14, no. 1
p. 171

Abstract

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Unlike transistors, the continuous downscaling of feature size in CMOS technology leads to a dramatic rise in interconnect resistivity and concomitant performance degradation [...]

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