Obtaining Thin Films of ZnO Through Thermal Evaporation in Vacuum and Oxidation

Abstract

The paper presents the obtaining of thin films out of ZnO by thermal evaporation and oxidation, in a conventional furnace, at various temperatures between 350-550 oC of films from pure Zn deposited. The influence of current intensity, deposition time and oxidation temperature on film structure and transparency was monitored.

Keywords

• thermal evaporation of zinc
• thermal oxidation
• microscopy