Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure
Andi Setiono,
Michael Fahrbach,
Alexander Deutschinger,
Ernest J. Fantner,
Christian H. Schwalb,
Iqbal Syamsu,
Hutomo Suryo Wasisto,
Erwin Peiner
Affiliations
Andi Setiono
Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Michael Fahrbach
Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Alexander Deutschinger
SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria
Ernest J. Fantner
SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria
Christian H. Schwalb
GETec Microscopy GmbH, 1220 Vienna, Austria
Iqbal Syamsu
Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Hutomo Suryo Wasisto
Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Erwin Peiner
Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.
