Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing

Shen Liu; Hang Xiao; Yanping Chen; Peijing Chen; Wenqi Yan; Qiao Lin; Bonan Liu; Xizhen Xu; Yiping Wang; Xiaoyu Weng; Liwei Liu; Junle Qu

doi:10.3390/s22239068

Sensors (Nov 2022)

Nano-Optomechanical Resonators Based on Suspended Graphene for Thermal Stress Sensing

Shen Liu,
Hang Xiao,
Yanping Chen,
Peijing Chen,
Wenqi Yan,
Qiao Lin,
Bonan Liu,
Xizhen Xu,
Yiping Wang,
Xiaoyu Weng,
Liwei Liu,
Junle Qu

Affiliations

Shen Liu: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Hang Xiao: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Yanping Chen: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Peijing Chen: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Wenqi Yan: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Qiao Lin: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Bonan Liu: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Xizhen Xu: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Yiping Wang: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Xiaoyu Weng: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Liwei Liu: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China
Junle Qu: Key Laboratory of Optoelectronic Devices and Systems of Guangdong Province and Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University, No. 3688, Nanhai Avenue, Shenzhen 518060, China

DOI: https://doi.org/10.3390/s22239068
Journal volume & issue: Vol. 22, no. 23
p. 9068

Abstract

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Nanomechanical resonators made from suspended graphene combine the properties of ultracompactness and ultrahigh detection sensitivity, making them interesting devices for sensing applications. However, nanomechanical systems can be affected by membrane stress. The present work developed an optomechanical resonator for thermal stress sensing. The proposed resonator consists of a section of hollow core fiber (HCF) and a trampoline graphene–Au membrane. An all-optical system that integrated optical excitation and optical detection was applied. Then, the resonance frequency of the resonator was obtained through this all-optical system. In addition, this system and the resonator were used to detect the membrane’s built-in stress, which depended on the ambient temperature, by monitoring the resonance frequency shift. The results verified that the temperature-induced thermal effect had a significant impact on membrane stress. Temperature sensitivities of 2.2646 kHz/°C and 2.3212 kHz/°C were obtained when the temperature rose and fell, respectively. As such, we believe that this device will be beneficial for the quality monitoring of graphene mechanical resonators.

Published in Sensors

ISSN: 1424-8220 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Chemical technology
Website: http://www.mdpi.com/journal/sensors

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