IEEE Photonics Journal (Jan 2012)
MeV Energy <formula formulatype="inline"><tex Notation="TeX">$\hbox{N}^{+}$</tex></formula>-Implanted Planar Optical Waveguides in Er-Doped Tungsten-Tellurite Glass Operating at 1.55 <formula formulatype="inline"><tex Notation="TeX"> $\mu\hbox{m}$</tex></formula>
Abstract
We report on the fabrication and characterization of planar waveguides in an Er-doped tungsten-tellurite glass by implantation of 3.5 MeV N+ ions. Implantations were carried out in a wide fluence range of 1·1016 ÷8 ·1016 ions/cm2. Waveguides were characterized by m-line spectroscopy and spectroscopic ellipsometry. Irradiation-induced refractive index modulation saturated around a fluence of 8 ·1016 ions/cm2. Waveguides operating at 1550 nm were obtained in that material using 3.5 MeV N+ ion implantation.
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