Micromachines (Jan 2020)

Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

  • Linyu Yan,
  • Dong Yang,
  • Qihuang Gong,
  • Yan Li

DOI
https://doi.org/10.3390/mi11020112
Journal volume & issue
Vol. 11, no. 2
p. 112

Abstract

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Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.

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