Proceedings (Aug 2017)

A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors

  • Philip Kaupmann,
  • Stefan Pinter,
  • Jochen Franz,
  • Reinhard Streiter,
  • Thomas Otto

DOI
https://doi.org/10.3390/proceedings1040546
Journal volume & issue
Vol. 1, no. 4
p. 546

Abstract

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In this paper we present a novel approach to achieve indirect quasistatic deflection of 2D MEMS scanning micromirrors by solely resonant excitation utilizing gyroscopic effects. Therefore the micromirror is set to oscillate in its mirror plane additionally to its primary resonant oscillation with a similar frequency. According to angular momentum conservation this leads to a quasistatic deflection along a third axis orthogonal to the former. To investigate the applicability to MEMS micromirrors we develop a reference MEMS design to be used for fully transient FEM simulation. To achieve consistent simulation results we further develop a closed loop control algorithm. We then perform simulations using this method to prove the viability of the proposed concept

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