Mode Coupling in Electromechanical Systems: Recent Advances and Applications

Meng‐Lin Guo; Jia‐Wei Fang; Jun‐Fan Chen; Bo‐Lin Li; Hui Chen; Qiang Zhou; You Wang; Hai‐Zhi Song; K. Yu. Arutyunov; Guang‐Can Guo; Zhi‐Ming Wang; Guang‐Wei Deng

doi:10.1002/aelm.202201305

Advanced Electronic Materials (Jul 2023)

Mode Coupling in Electromechanical Systems: Recent Advances and Applications

Meng‐Lin Guo,
Jia‐Wei Fang,
Jun‐Fan Chen,
Bo‐Lin Li,
Hui Chen,
Qiang Zhou,
You Wang,
Hai‐Zhi Song,
K. Yu. Arutyunov,
Guang‐Can Guo,
Zhi‐Ming Wang,
Guang‐Wei Deng

Affiliations

Meng‐Lin Guo: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Jia‐Wei Fang: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Jun‐Fan Chen: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Bo‐Lin Li: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Hui Chen: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Qiang Zhou: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
You Wang: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Hai‐Zhi Song: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
K. Yu. Arutyunov: National Research University Higher School of Economics Moscow 101000 Russia
Guang‐Can Guo: CAS Key Laboratory of Quantum Information University of Science and Technology of China Hefei Anhui 230026 China
Zhi‐Ming Wang: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China
Guang‐Wei Deng: Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China

DOI: https://doi.org/10.1002/aelm.202201305
Journal volume & issue: Vol. 9, no. 7
pp. n/a – n/a

Abstract

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Abstract Mode interactions have recently become the focus of intense research in micro/nanoelectromechanical systems (M/NEMS) due to their ability to improve device performance and explore the frontiers of fundamental physics. Understanding and controlling coupling between vibrational modes are critical for the development of advanced M/NEMS devices. This review summarizes the recent advances in studies of coupling between multiple modes in M/NEMS resonators, focusing especially on experimental developments and practical applications. First, depending on spatial distribution of interacting modes, this review divides the coupled mechanism in three types: intermode, near‐neighbor, and long‐range coupling. Then, several fundamental physics approaches based on mechanical‐mode coupling, including linear and nonlinear coupling, modal localization, synchronization, and phonon manipulation are reviewed. This review also introduces sensing applications by using coupled mechanical modes. Finally, the state‐of‐the‐art open questions and challenges are reviewed.

Published in Advanced Electronic Materials

ISSN: 2199-160X (Online)
Publisher: Wiley-VCH
Country of publisher: Germany
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electric apparatus and materials. Electric circuits. Electric networks; Science: Physics
Website: https://onlinelibrary.wiley.com/journal/2199160x

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