The Preparation of Thin Alumina Films by Metal-Organic Chemical Vapour Deposition: A Short Review

• Haanappel, V.A.C.,
• van Corbach, H.D.,
• Fransen, T.,
• Gellings, P.J.

Affiliations

Haanappel, V.A.C.

van Corbach, H.D.

Fransen, T.

Gellings, P.J.