Low-Temperature Nitrogen Doping of Nanocrystalline Graphene Films with Tunable Pyridinic‑N and Pyrrolic‑N by Cold-Wall Plasma-Assisted Chemical Vapor Deposition

• Nur Hamizah Zainal Ariffin,
• Muhammad Aniq Shazni Mohammad Haniff,
• Mohd Ismahadi Syono,
• Mohd Ambri Mohamed,
• Azrul Azlan Hamzah,
• Abdul Manaf Hashim

Affiliations

Nur Hamizah Zainal Ariffin

Advanced Devices and Material Engineering Research Lab, Department of Electronic Systems Engineering, Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia

Muhammad Aniq Shazni Mohammad Haniff

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia

Mohd Ismahadi Syono

Advanced Devices Lab, MIMOS Berhad, Kuala Lumpur, Malaysia

Mohd Ambri Mohamed

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia

Azrul Azlan Hamzah

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Malaysia

Abdul Manaf Hashim

Advanced Devices and Material Engineering Research Lab, Department of Electronic Systems Engineering, Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Kuala Lumpur, Malaysia