Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
Zhihong Lei,
Yan Chen,
Guisheng Xu,
Jinfeng Liu,
Maodan Yuan,
Lvming Zeng,
Xuanrong Ji,
Dawei Wu
Affiliations
Zhihong Lei
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Yan Chen
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Guisheng Xu
Key Laboratory of Transparent Opto-Functional Advanced Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China
Jinfeng Liu
Key Laboratory of Transparent Opto-Functional Advanced Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China
Maodan Yuan
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Lvming Zeng
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Xuanrong Ji
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Dawei Wu
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.
