Deposition and Characterization of Transparent Conductive Oxide ZnO Thin Films By Sol-Gel Spin Coating Technique

Abstract

Continuously developing optoelectronic technology needs alternative transparent conductive oxide (TCO) materials. TCO materials have many application areas due to their high optical transmittance and being conductive materials. Zinc Oxide (ZnO) thin films are one of the most important members of TCO materials and they are widely used in optoelectronic technology. In this study, ZnO thin films were produced on glass substrate by sol-gel spin coating technique which is a simple and low cost thin film coating technique and produced thin films were annealed at different temperatures in air. By changing parameters of spin coating technique, the conditions of the best film that produced were determined X-Ray Diffraction (XRD). Also the surface and optical properties of the films were characterized by using Field Emission Scanning Electron Microscopy (FESEM) and UV-Visible Spectroscopy respectively. As a result of these studies, by examining the crystal structures of the obtained thin films in detail, the effects of the experimental parameters and the annealing temperature on the crystallization of the thin films were determined.

Keywords

• Sol-Gel
• Transparent Conductive
• Oxides (TCO)
• ZnO
• Thin Films