Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system

Haiqiang Yu; Jinguo Han; Shiyu Li; Dongpo Zhao; Jinhui Wang; Yebing Tian; Jieqiong Lin

Materials & Design (Dec 2022)

Hierachical micro/nano structures fabrication by a novel tri-axial piezoelectric servo system

Haiqiang Yu,
Jinguo Han,
Shiyu Li,
Dongpo Zhao,
Jinhui Wang,
Yebing Tian,
Jieqiong Lin

Affiliations

Haiqiang Yu: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
Jinguo Han: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China; Shandong Provincial Key Laboratory of Precision Manufacturing and Non-traditional Machining, China; Corresponding author at: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China.
Shiyu Li: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
Dongpo Zhao: School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Jinhui Wang: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
Yebing Tian: School of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
Jieqiong Lin: School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China

Journal volume & issue: Vol. 224
p. 111330

Abstract

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In this study, a novel tri-axial piezoelectric servo system is developed for micro/nano manufacturing considering the stroke, motion resolution, crosstalk, working bandwidth, compact structure, and position and pose modulation capability of cutting tool. A compliant mechanism which consists four compliant chains is designed based on trapezoidal leaf spring, X-type flexure hinge and right circular flexure hinge. The structure dimensional parameters are determined by finite element analysis (FEA) optimization method. Analytical modeling for compliance and dynamics are established and verified by FEA. Besides, the prototype of the developed tri-axial piezoelectric servo system was manufactured and experimentally tested. Testing results show that the high stroke, low parasitic motion, high motion resolution as well as the dynamic response can be obtained in terms of the compact structure. Moreover, the tracking control is conducted to demonstrate the controllability of the tri-axial piezoelectric servo system. Finally, the stability and feasibility of the developed system is verified by typical micro/nano structures manufacturing.

Published in Materials & Design

ISSN: 0264-1275 (Print); 1873-4197 (Online)
Publisher: Elsevier
Country of publisher: United Kingdom
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.journals.elsevier.com/materials-and-design

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