Templated Nano Electrodeposition: Novel Method for Mass Fabrication of Flexible Plasmonic Metasurfaces

Abstract

Abstract Flexible plasmonic metasurfaces have attracted considerable attention due to the mechanical flexibility of the metasurface that enables new functions and integrated applications, but the costly fabrication often hinders their further employment. Here, this work proposes a novel method to fabricate large‐area, high‐volume, and cost‐effective flexible plasmonic metasurface aspects through the nanotemplated electrodeposition and imprinting transfer processes, which minimize the fabrication cost without sacrificing their nanophotonic performance. The fabricated plasmonic metasurface has comparable performance in biomolecular detection with those fabricated through conventional methods, which shows the potential employment of the templated fabricated flexible metasurface in medical applications such as point to care and in situ biomolecular detection. Moreover, the low‐cost and low processing parameter requirements of this method will also contribute to many other metasurface‐based nano‐optic applications, including surface‐enhanced Raman spectroscopy, fluorescence enhancement, and structural colors.

Keywords

• biosensors
• metasurfaces
• nano‐electrodeposition
• nanoimprint lithography
• plasmonics