Micromachines (Sep 2023)

Review of Gas Dynamic RF-Only Funnel Technique for Low-Energy and High-Quality Ion Beam Extraction into a Vacuum

  • Victor Varentsov

DOI
https://doi.org/10.3390/mi14091771
Journal volume & issue
Vol. 14, no. 9
p. 1771

Abstract

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This paper reviews the development and present status of a novel gas dynamic RF-only funnel technique for low-energy ion beam extraction into vacuum. This simple and original technique allows for the production of high-quality continuous and pulsed ion beams in a wide range of masses, which have a very small transverse and longitudinal emittance.

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