High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

• Ji-Seoung Jeong,
• Sunyoung Shin,
• Bo Keun Park,
• Seung Uk Son,
• Taek-Mo Chung,
• Ji Yeon Ryu

Affiliations

Ji-Seoung Jeong

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Sunyoung Shin

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Bo Keun Park

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Seung Uk Son

Department of Chemistry, Sungkyunkwan University (SKKU), Gyeonggi-do, Republic of Korea

Taek-Mo Chung

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea

Ji Yeon Ryu

Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, Daejeon, Republic of Korea