Micromachines (Aug 2024)

Indirect Enhancement of ALD Thin-Film Properties Induced by the ECAP Modification of an As-Extruded Mg-Ca Alloy

  • Pi-Chen Lin,
  • Jun-Yu Li,
  • Hou-Jen Chen,
  • Kaifan Lin,
  • Miin-Jang Chen,
  • Kun-Ming Lin,
  • Hsin-Chih Lin

DOI
https://doi.org/10.3390/mi15081006
Journal volume & issue
Vol. 15, no. 8
p. 1006

Abstract

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The purpose of this study is to investigate the indirect effects on the properties of ZrO2 films deposited by atomic layer deposition (ALD) when an Mg-Ca alloy is modified through equal-channel angular pressing (ECAP) following extrusion. The study aims to understand how the increase in CaO content in the native oxide layer of the Mg-Ca alloy influences the crystallinity and defect density of the ZrO2 film. Consequently, the corrosion protection performance of the ZrO2 film is enhanced by 1.2 to 1.5 times. A reduction in the anti-scratch property of the ZrO2 film was also observed, with a critical load reduction of 34 μN. This research provides a detailed analysis of the modifications induced by ECAP on the as-extruded Mg-Ca alloy and its subsequent impact on the properties of the ZrO2 film.

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