A Novel Design Strategy for Cantilever Based MEMS Piezoelectric Vibration Energy Harvesters: FEM Parametric Analysis and Modeling

Abstract

Vibration-based energy-harvesting (VEH) technology is a viable alternative power source that addresses the issue of battery capacity constraints in portable electronic devices. A novel design strategy for developing a piezoelectric vibrational energy harvester (PVEH) based on a microelectromechanical system (MEMS) is proposed in this paper. Through FEM simulation and analysis, a correlation between the proof mass coverage (PMC) and piezoelectric coverage (PEC) for energy harvesters with different beam geometries is developed. The results show that the output power and resonant frequencies of the energy harvester are strongly dependent on the amount of PMC, PEC, and beam geometry. The optimum piezoelectric layer length for a PVEH depends on the amount of PMC and geometry of the beam. Moreover, as the PMC increases, the output power is found to be increasing. The structure with 80% PMC provides maximum output power. Also, a trapezoidal beam will give a lower resonant frequency than a rectangular beam. Thus the optimum design methodology for a cantilever-based MEMS PVEH in a given layout is to select the trapezoidal-shaped beam with a PMC of 60% to 80% and piezoelectric layer length equal to the beam length. This method would provide optimised resonant frequency and output power performance. Additionally, an analytical model is developed for the optimised cantilever PVEH based on trapezoidal geometry, and the simulation findings are validated with the analytical results.

Keywords

• Piezoelectric coverage
• Resonant frequency
• Energy harvester
• Proof mass coverage