Enhanced Sensitivity of a Resistive Pressure Sensor Based on a PEDOT:PSS Thin Film on PDMS with a Random-Height Micropyramid Structure

Abstract

The use of flexible pressure sensors has become increasingly widespread in a variety of applications, including wearable electronics and electronic skin. These sensors need to exhibit high sensitivity, wide detection limits, a fast response time, a linear response, and mechanical stability. In this study, we demonstrate a resistive pressure sensor based on randomly arranged micropyramid polydimethylsiloxane (PDMS) with a conductive poly(3,4-ethylenedioxythiophene): polystyrenesulfonate (PEDOT:PSS) thin film with a sensitivity of 391 kPa−1, a response time of 52.91 ms, a recovery time of 4.38 ms, and a limit of detection (LOD) of 0.35 kPa. Electrodes are then connected to a pair of the proposed resistive pressure sensors that face each other to fabricate a pressure sensing device. We examine various characteristics of the fabricated device, including the changes observed when applying loads ranging from 0 to 2.58 kPa. The proposed sensor exhibits high sensitivity and a rapid response time.

Keywords

• piezoresistive sensor
• resistive pressure sensor
• PDMS/PEDOT:PSS
• micropyramid structure