Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

• Roberto Pezone,
• Sebastian Anzinger,
• Gabriele Baglioni,
• Hutomo Suryo Wasisto,
• Pasqualina M. Sarro,
• Peter G. Steeneken,
• Sten Vollebregt

Affiliations

Roberto Pezone

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Sebastian Anzinger

Infineon Technologies AG

Gabriele Baglioni

Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology

Hutomo Suryo Wasisto

Infineon Technologies AG

Pasqualina M. Sarro

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology

Peter G. Steeneken

Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology

Sten Vollebregt

Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology