Lightweight Gas Sensor Based on MEMS Pre-Concentration and Infrared Absorption Spectroscopy Inside a Hollow Fiber

Abstract

This paper reports on a compact and lightweight sensor for analysis of gases/vapors by means of a MEMS-based pre-concentrator coupled to a miniaturized infrared absorption spectroscopy (IRAS) module. The pre-concentrator was utilized to sample and trap vapors in a MEMS cartridge filled with sorbent material and to release them once concentrated by fast thermal desorption. It was also equipped with a photoionization detector for in-line detection and monitoring of the sampled concentration. The vapors released by the MEMS pre-concentrator are injected into a hollow fiber, which acts as the analysis cell of the IRAS module. The miniaturized internal volume of the hollow fiber of about 20 microliters keeps the vapors concentrated for analysis, thus allowing measurement of their infrared absorption spectrum with a signal to noise ratio high enough to identify the molecule, despite the short optical path, starting from sampled concentration in air down to parts per million. Results obtained for ammonia, sulfur hexafluoride, ethanol and isopropanol are reported to illustrate the sensor detection and identification capability. A limit of identification (LoI) of about 10 parts per million was validated in the lab for ammonia. The lightweight and low power consumption design of the sensor allowed operation onboard unmanned aerial vehicles (UAVs). The first prototype was developed within the EU Horizon 2020 project ROCSAFE for the remote assessment and forensic examination of a scene in the aftermath of industrial or terroristic accidents.

Keywords

• gas analyzer
• MEMS
• absorption spectroscopy
• IR hollow fiber
• safety and security