Direct Synthesis of Large-Scale Multilayer TaSe2 on SiO2/Si Using Ion Beam Technology

• Hsu-Sheng Tsai,
• Fan-Wei Liu,
• Jhe-Wei Liou,
• Chong-Chi Chi,
• Shin-Yi Tang,
• Changan Wang,
• Hao Ouyang,
• Yu-Lun Chueh,
• Chaoming Liu,
• Shengqiang Zhou,
• Wei-Yen Woon

Affiliations

Hsu-Sheng Tsai

Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

Fan-Wei Liu

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.

Jhe-Wei Liou

Department of Physics, National Central University, Taoyuan, Taiwan, R. O. C.

Chong-Chi Chi

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.

Shin-Yi Tang

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.

Changan Wang

Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

Hao Ouyang

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.

Yu-Lun Chueh

Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.

Chaoming Liu

Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

Shengqiang Zhou

Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

Wei-Yen Woon

Department of Physics, National Central University, Taoyuan, Taiwan, R. O. C.