“Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs

Abstract

Microfabricated semiconductor devices are becoming increasingly relevant, alsofor the detection of biological and chemical quantities. Especially, the “marriage” ofbiomolecules and silicon technology often yields successful new sensor concepts. Thefabrication techniques of such silicon-based chemical sensors and biosensors, respectively,will have a distinct impact in different fields of application such as medicine, foodtechnology, environment, chemistry and biotechnology as well as information processing.Moreover, scientists and engineers are interested in the analytical benefits of miniaturisedand microfabricated sensor devices. This paper gives a survey on different types ofsemiconductor-based field-effect structures that have been recently developed in ourlaboratory.

Keywords

• field-effect sensor
• ISFET
• EIS
• LAPS.