Zhejiang Daxue xuebao. Lixue ban (May 2003)

Simulation of the motion of poly-atoms in the early stage of the film growth(薄膜生长初期多原子移动影响的模拟)

SONGChen-lu(宋晨路),
LIUYong(刘涌),
HANGao-rong(韩高荣)

Affiliations

SONGChen-lu(宋晨路): College of Materials Scienee and Chemical Engineering, Zhejiang University, Hangzhou 310027, China(浙江大学材化学院，浙江杭州 310027)
LIUYong(刘涌): College of Materials Scienee and Chemical Engineering, Zhejiang University, Hangzhou 310027, China(浙江大学材化学院，浙江杭州 310027)
HANGao-rong(韩高荣): College of Materials Scienee and Chemical Engineering, Zhejiang University, Hangzhou 310027, China(浙江大学材化学院，浙江杭州 310027)

DOI
Journal volume & issue: Vol. 30, no. 3
pp. 274 – 276

Abstract

模拟了在低温底上沉积单层薄膜初期的表面形貌.提出了新的算法,实现了多个原子同时在沉积基底上移动的过程,克服了以往只能模拟基底上仅有一个运动原子的缺点,同时引入了沉积流量,并在此基础上讨论了移动步数、沉积流量等因素对生长的影响作用.模拟结果与实验相近,获得的花样具有分形特征.

Published in Zhejiang Daxue xuebao. Lixue ban

ISSN: 1008-9497 (Print)
Publisher: Zhejiang University Press
Country of publisher: China
LCC subjects: Science: Mathematics: Instruments and machines: Electronic computers. Computer science; Science: Physics
Website: https://www.zjujournals.com/sci/EN/1008-9497/home.shtml

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