IEEE Photonics Journal (Jan 2016)

Modulating Ohmic Contact Through InGa<sub>x</sub>N<sub>y</sub>O<sub>z</sub> Interfacial Layer for High-Performance InGaN/GaN-Based Light-Emitting Diodes

  • Binbin Zhu,
  • Swee Tiam Tan,
  • Wei Liu,
  • Shunpeng Lu,
  • Yiping Zhang,
  • Shi Chen,
  • Namig Hasanov,
  • Xuejun Kang,
  • Hilmi Volkan Demir

DOI
https://doi.org/10.1109/JPHOT.2016.2570422
Journal volume & issue
Vol. 8, no. 3
pp. 1 – 8

Abstract

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We report the improved performance of InGaN/GaN-based light-emitting diodes (LEDs) through the design and the formation of the InGaxNyOz interfacial layer, which maintains high reflectivity of silver and forms good ohmic contact between pristine silver and p-GaN. The interfacial layer was designed and formed by depositing a thin layer of indium tin oxide (ITO) on top of p-GaN, followed by thermal annealing, to enable the interdiffusion and the intermixing of In, Sn, Ga, O, and N atoms. Both electrical and optical performances of the LED with the optimized InGaxNyOz interfacial layer are improved, thus achieving the highest wall-plug efficiency, compared with those LEDs with and without ITO layers at operation current.

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