Micromachines (Oct 2022)

Electrical Modeling and Characterization of Graphene-Based On-Chip Spiral Inductors

  • Da-Wei Wang,
  • Meng-Jiao Yuan,
  • Jia-Yun Dai,
  • Wen-Sheng Zhao

DOI
https://doi.org/10.3390/mi13111829
Journal volume & issue
Vol. 13, no. 11
p. 1829

Abstract

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This paper investigates the electrical performance of graphene-based on-chip spiral inductors by virtue of a physics-based equivalent circuit model. The skin and proximity effects, as well as the substrate loss effect, are considered and treated appropriately. The graphene resistance and inductance are combined into the circuit model. It is demonstrated that the electrical characteristics of the on-chip square spiral inductor can be improved by replacing copper with graphene. Moreover, graphene exhibits more effectiveness in improving the inductance in tapered inductors than uniform ones.

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