ACS Omega
(Nov 2022)
Numerical Simulation Study on Flow and Heat Transfer of the Tungsten Crucible CVD Reactor
- Lipei Peng,
- Han Dong,
- Shaobo Li,
- Zhanwei Wang,
- Xiangjun Meng,
- Yafeng Wang,
- Tengshi Liu,
- Xiangyu Li,
- Jialiang Ji
Affiliations
- Lipei Peng
- School of Materials Science and Engineering, Shanghai University, Shanghai, China
- Han Dong
- School of Materials Science and Engineering, Shanghai University, Shanghai, China
- Shaobo Li
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Zhanwei Wang
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Xiangjun Meng
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Yafeng Wang
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Tengshi Liu
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Xiangyu Li
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- Jialiang Ji
- PERIC Special Gas Co., Ltd, Handan City, Hebei Province, China
- DOI
-
https://doi.org/10.1021/acsomega.2c04037
- Journal volume & issue
-
Vol. 7,
no. 46
pp.
42044
– 42055
WeChat QR code
