Groove Formation in Glass Substrate by a UV Nanosecond Laser

Abstract

This study reports the laser grooving of glass. In this study, an ultraviolet (UV) nanosecond laser is used to produce grooves in soda lime glass by varying laser power, scan speed, pulse repetition rate, and number of scans. The threshold power density to generate damage on glass surface is found to be ~6.37 × 108 W/cm2. According to the result of a single laser scan, at a high laser power and low scan speed, material removal does not nearly occur, and only volume melting underneath the glass surface and large thermal crack are induced. With the decreasing laser power and increasing scan speed, a groove with a smooth surface is formed owing to the melting-dominant material removal process. The groove of rough surface morphology is produced with the further increase of the scan speed due to shattering induced by shock wave. Under this condition, it is found that either small cracks are produced or a crack-free groove is obtained. In this study, the fabrication of the microchannel for bio-chip application is also attempted by multiple laser scans. The near rectangular-shaped and crack-free groove (width × depth: ~220 μm × ~500 μm) with quite a smooth surface is fabricated by the multiple laser scans with a non-zero scan spacing.

Keywords

• nanosecond laser
• ultra violet (uv)
• glass
• groove
• laser grooving