Study on the performance of MOS - based displacement sensor

Abstract

The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently improved, and the sensitivity reached 108.1mw/mm for the transient peak value. Maximum saturation voltage reached 72.1mw. This work demonstrates a novel way to increase sensitivity for position sensitive detectors.