EPJ Web of Conferences (Jan 2018)

Modelling of EUV light sources based on microwave discharge in inhomogeneous flow of nonequilibrium plasma with multiply charged tin and xenon ions

  • Abramov I.S.,
  • Gospodchikov E.D.,
  • Shalashov A.G.

DOI
https://doi.org/10.1051/epjconf/201818701001
Journal volume & issue
Vol. 187
p. 01001

Abstract

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